Sputter deposition - LNF Wiki
Deposition & Planarization
IPCI ::
Optimizing of process parameter and further step coverage improving regarding copper seed deposition for 50nm NAND flash | Semantic Scholar
Optimization and Evaluation of Sputtering Barrier/Seed Layer in Through Silicon Via for 3-D Integration
Cu seed step coverage evolution with target lifetime for long-throw self ionized physical vapor deposition chambers - ScienceDirect
Films deposited in trenches/vias by conventional physical vapor... | Download Scientific Diagram
Monte Carlo simulations of sputter deposition and step coverage of thin films - ScienceDirect
PPT - Chapter 9 Thin film deposition PowerPoint Presentation, free download - ID:1085012
Study of the step coverage and contact resistance by using two-step TiN barrier and evolve simulation
Radical step coverage improvement in directional beam target (DBT) sputter - ScienceDirect
Korean Journal of Metals and Materials
Lecture06-Thin Film Deposition
Thin film deposition: key performance indices - ppt video online download
Thin film deposition Sputter deposition
Factors that Determine Deposition Performance
Lecture 10 & 11
Sputter deposition - LNF Wiki
Iridium wire grid polarizer fabricated using atomic layer deposition. - Abstract - Europe PMC
Structural devices: 7.3.4 Physical vapour deposition (PVD), sputtering - OpenLearn - Open University
Effect of Process Parameters on the Angular Distribution of Sputtered Cu Flux in Long-Throw Sputtering System
Sputtering | Queen's Advanced MicroEngineering Centre
PVD Metal Depostion
