Electron-beam lithography on M108Y and M35G chemically amplified DUV photoresists - ScienceDirect
Electron beam lithography - LNF Wiki
Electron-beam lithography - Wikipedia
Electron-beam lithography for polymer bioMEMS with submicron features | Microsystems & Nanoengineering
Lithography - LNF Wiki
Electron Optical Lithography - an overview | ScienceDirect Topics
Electron Beam Lithography | Materials Research Institute
Optimization of an electron beam lithography instrument for fast, large area writing at 10 kV acceleration voltage: Journal of Vacuum Science & Technology B: Vol 31, No 4
Direct Wavelength-Selective Optical and Electron-Beam Lithography of Functional Inorganic Nanomaterials | ACS Nano
Comparison of e-beam lithography (EBL) versus direct-write EBL. In EBL,... | Download Scientific Diagram
Electron-Beam Lithography for Patterning Biomolecules at the Micron and Nanometer Scale | Chemistry of Materials
Reflective electron beam lithography: A maskless ebeam direct write lithography approach using the reflective electron beam lithography concept: Journal of Vacuum Science & Technology B: Vol 28, No 6
Direct writing - LNF Wiki
Micromachines | Free Full-Text | Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
9: Process using electron beam lithography for writing the patterns and... | Download Scientific Diagram
Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays | Microsystems & Nanoengineering
Lithography
Template fabrication scheme by combining electron beam lithography in... | Download Scientific Diagram
Multiple-electron-beam direct-write comes of age
Schematic illustration of electron beam lithography. Electron beam is... | Download Scientific Diagram
A multiple-electron-beam exposure system for high-throughput, direct-write submicrometer lithography | Semantic Scholar
Trehalose glycopolymer resists allow direct writing of protein patterns by electron-beam lithography | Nature Communications
Direct Patterning of Zinc Sulfide on a Sub-10 Nanometer Scale via Electron Beam Lithography | ACS Nano
JEOL USA blog | An overview of electron beam lithography
Comparison of e-beam lithography (EBL) versus direct-write EBL. In EBL,... | Download Scientific Diagram
